Dual-frequency capacitive discharges: Effect of low-frequency current on electron distribution function
نویسندگان
چکیده
منابع مشابه
Electron heating mode transitions in dual frequency capacitive discharges
We consider electron heating in the sheath regions of capacitive discharges excited by a combination of two frequencies, one much higher than the other. There is a common supposition that in such discharges the higher frequency is the dominant source of electron heating. In this letter, we discuss closed analytic expressions quantifying the Ohmic and collisionless electron heating in a dual fre...
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ژورنال
عنوان ژورنال: Physics of Plasmas
سال: 2005
ISSN: 1070-664X,1089-7674
DOI: 10.1063/1.1888325